Estudio de la descarga luminiscente de radio frecuencia en atmósferas favorables a la formación de polimetro, utilizando la doble sonda de langmuir

Armando Sarmiento S, Jaime Castro B

Resumen


Se describe la instalación de un reactor plásmico versátil y de bajo costo, operando en el rango de r.f (27,12 MHz) con una potencia de hasta 150 W, para la deposición de películas de polímero y tratamiento superficial de materiales. Mediante este dispositivo se realizó la deposición de películas de polímero de butano, isobutano y etileno. El plasma generado en el reactor se estudia mediante la doble sonda electrostática


Texto completo:

ART 4

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DOI: https://doi.org/10.24054/01204211.v1.n1.2005.56

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